Pushing the XEDS Boundaries in Materials Research: Low Voltage XED Spectrum Imaging in the FEG-SEM

Low-voltage high resolution imaging in advanced field emission gun scanning electron microscopes (FEG-SEMs) is an essential technique in the characterisation of a broad range of materials – particularly for polymers and complex multiphase/multicomponent materials, that can experience significant charging effects during conventional 10 to 20 kV imaging. In particular, the analysis of corrosion specimens can be problematic due to electron charging effects when studying the fine structure of oxides. Previously, it was necessary to change FEG-SEM operating conditions to generate x-ray energy dispersive spectroscopy (XEDS) data. This could make it difficult to locate the same feature under significantly different imaging conditions, and is particularly challenging for beam-charging materials. In this study we have applied low voltage XEDS analysis to evaluate an austenitic stainless steel corrosion specimen to study the oxides in cracks.